Art

J-GLOBAL ID：201202227656511771   Reference number：12A0783898

Thermophysical and electrical properties of Al-doped ZnO films

AlドープZnO膜の熱物理および電気的性質

Author (6)： OKA Nobuto (Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Chuo, Sagamihara, Kanagawa 252-5258, JPN) ,  KIMURA Kentaro (Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Chuo, Sagamihara, Kanagawa 252-5258, JPN) ,  YAGI Takashi (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba central 3 ...) ,  TAKETOSHI Naoyuki (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba central 3 ...) ,  BABA Tetsuya (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba central 3 ...) ,  SHIGESATO Yuzo (Graduate School of Sci. and Engineering, Aoyama Gakuin Univ., 5-10-1 Fuchinobe, Chuo, Sagamihara, Kanagawa 252-5258, JPN)
Material： Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)
Volume： 111  Issue： 9  Page： 093701-093701-5  Publication year： May. 01, 2012 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *heat reflection ,  *aluminum ,  *zinc oxide ,  *thermal diffusivity ,  *molybdenum ,  *alumina ,  magnetron sputtering ,  *electrical resistivity ,  thermal conductivity ,  transparent conducting thin films ,  *doping ,  diffusion coefficient ,  indium tin oxide ,  multilayer film ,  silicon dioxide
Semi thesaurus term： silica ,  *thermal diffusivity ,  thermal diffusion coefficient

JST classification (2)： Other thermal properties of non-metals  (BL05040J) ,  Electric conduction in crystalline semiconductors  (BM03043X)

Terms in the title (3)： AlドープZnO ,  物理 ,  電気的性質