Art

J-GLOBAL ID：201202279909129852   Reference number：12A0337509

Effects of substrate temperature on the ion conductivity of hydrated ZrO₂ thin films prepared by reactive sputtering in H₂O atmosphere

H₂O雰囲気中での反応性スパッタリングで作成した水化ZrO₂薄膜のイオン伝導率におよぼす基板温度の効果

Author (7)： LI Ning (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN) ,  SUZUKI Miki (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN) ,  ABE Yoshio (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN) ,  KAWAMURA Midori (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN) ,  SASAKI Katsutaka (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN) ,  ITOH Hidenobu (Dep. of Materials Sci. and Engineering, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN) ,  SUZUKI Tsutomu (Dep. of Biotechnology and Environmental Chemistry, Kitami Inst. of Technol., Kitami, Hokkaido 090-8507, JPN)
Material： Solar Energy Materials and Solar Cells  (Sol Energy Mater Sol Cells)
Volume： 99  Page： 160-165  Publication year： Apr. 2012 
JST Material Number： D0513C  ISSN： 0927-0248  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *reactive sputtering ,  *sputtered deposition ,  water vapor ,  *zirconium oxide ,  *evaporated film ,  crystal structure ,  density ,  refractive index ,  morphology(form) ,  *electrical conductivity ,  substrate temperature
Semi thesaurus term： *ionic conductivity ,  surface shape

JST classification (2)： Oxide thin films  (BK14050P) ,  Electric conduction in other inorganic compounds  (BM03044O)

Terms in the title (8)： H2O ,  雰囲気 ,  反応性スパッタリング ,  水 ,  ZrO2 ,  薄膜 ,  イオン伝導率 ,  基板温度