Art

J-GLOBAL ID：201202294704724056   Reference number：12A0303786

Design and Fabrication of DC-18GHz Microwave Power Thin Film Resistors

DC-18GHzマイクロ波パワー薄膜抵抗器の設計と製作

Author (6)： Si Xu (State Key Lab. of electronic Thin Film and Integrated Devices, Univ. of Electronic Sci. and Technol. of China, ChengDu) ,  Zhang Wanli (State Key Lab. of electronic Thin Film and Integrated Devices, Univ. of Electronic Sci. and Technol. of China, ChengDu) ,  Jiang Hongchuan (State Key Lab. of electronic Thin Film and Integrated Devices, Univ. of Electronic Sci. and Technol. of China, ChengDu) ,  Peng Bin (State Key Lab. of electronic Thin Film and Integrated Devices, Univ. of Electronic Sci. and Technol. of China, ChengDu) ,  Wang Chaojie (State Key Lab. of electronic Thin Film and Integrated Devices, Univ. of Electronic Sci. and Technol. of China, ChengDu) ,  Li Yanrong (State Key Lab. of electronic Thin Film and Integrated Devices, Univ. of Electronic Sci. and Technol. of China, ChengDu)
Material： Weibo Xuebao  (Journal of Microwaves)
Volume： 27  Issue： 1  Page： 74-77  Publication year： 2011 
JST Material Number： C2385A  ISSN： 1005-6122  Document type： Article
Article type： 原著論文  Country of issue： China (CHN)  Language： CHINESE (ZH)

Thesaurus term： *microwave ,  *thin film resistor ,  magnetron sputtering ,  simulation ,  frequency domain ,  frequency (Hz) ,  VSWR ,  surface temperature ,  reactive magnetron sputtering ,  operating frequency ,  temperature range
Semi thesaurus term： temperature range

JST classification (1)： LCR parts  (NA05030D)

Terms in the title (6)： DC ,  マイクロ波 ,  パワー ,  薄膜抵抗器 ,  設計 ,  製作