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J-GLOBAL ID:201202297279198000   Reference number:12A0543237

Deterministic-doped Silicon Devices and Their Quantum Transport

Deterministicドープシリコンデバイスと量子輸送現象
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Volume: 111  Issue: 426(SDM2011 159-175)  Page: 1-5  Publication year: Jan. 31, 2012 
JST Material Number: S0532B  ISSN: 0913-5685  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Irradiational changes semiconductors  ,  Manufacturing technology of solid-state devices 
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