Art
J-GLOBAL ID：201302221755873170   Reference number：13A1738986

Regrowth characteristics of SiGe/Si by IBIEC and SPEG

IBIECとSPEGによるSiGe/Siの再成長特性
Author (5)：
AWANE K.

About AWANE K.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
KOKUBO Y.

About KOKUBO Y.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
YOMOGIDA M.

About YOMOGIDA M.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
YAMAMOTO Y.

About YAMAMOTO Y.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
NISHIMURA T.

About NISHIMURA T.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN


Material：
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)

About Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms


Volume： 307  Page： 399-403  Publication year： 2013 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*semiconductor material

About semiconductor material

, 
*crystal growth

About crystal growth

, 
Rutherford scattering spectroscopy

About Rutherford scattering spectroscopy

, 
epitaxy

About epitaxy

, 
solid phase growth

About solid phase growth

, 
ion beam

About ion beam


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*SiGe

About SiGe

, 
regrowth

About regrowth

, 
epitaxial growth

About epitaxial growth

, 
solid phase epitaxial growth

About solid phase epitaxial growth


JST classification (1)：
JST classification
Category name(code) classified by JST.
Interactions with ions 
(BK16070Z)

About Interactions with ions

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
SiGe

About SiGe

, 
Si

About Si

, 
成長特性

About 成長特性


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