Art
J-GLOBAL ID:201302252751308810   Reference number:13A1664266

革新的製造技術の新展開 スマートウィンドウ用電極材料のスパッタ成膜技術

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Material:
Volume: 58  Issue: 11  Page: 811-817  Publication year: Nov. 01, 2013 
JST Material Number: F0134A  ISSN: 0387-1037  CODEN: CMNGA  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Electrolytic equipment  ,  Sputtering  ,  Thin films of other inorganic compounds 
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