Art
J-GLOBAL ID:201302258177803733   Reference number:13A0673042

REGROWTH CHARACTERISTICS OF SiGe/Si BY IBIEC

IBIECによるSiGe/Siの再成長の特性評価
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Material:
Issue: 31  Page: 55-58  Publication year: Mar. 2013 
JST Material Number: L0263A  ISSN: 0914-2908  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

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Semiconductor thin films 
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