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J-GLOBAL ID:201302281532336078   Reference number:13A1756547

Removal of the Particles on a Silicon Surface using Electrostatic Force

静電吸着によるシリコン表面上の微粒子除去
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Volume: 56  Issue:Page: 273-276 (J-STAGE)  Publication year: 2013 
JST Material Number: G0194A  ISSN: 1882-2398  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 
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