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J-GLOBAL ID：201402208165091088   Reference number：14A1213580

Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.

生物学的応用のための厚いSOI LSIデバイスについての微小流体チャネル集積化

Author (7)： TIXIER-MITA Agnes (Res. Center for Advanced Sci. and Technol., The Univ. of Tokyo) ,  MORI Isao (Dep. of Electrical and Electronics Engineering, The Univ. of Tokyo) ,  TAKAHASHI Takuya (Res. Center for Advanced Sci. and Technol., The Univ. of Tokyo) ,  FRANCAIS Olivier (SATIE/IFR d’Alembert, Ecole Normale Superieure de Cachan) ,  PIOUFLE Bruno Le (SATIE/IFR d’Alembert, Ecole Normale Superieure de Cachan) ,  MITA Yoshio (Dep. of Electrical and Electronics Engineering, The Univ. of Tokyo) ,  TOSHIYOSHI Hiroshi (Res. Center for Advanced Sci. and Technol., The Univ. of Tokyo)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 134  Issue： 10  Page： 320-325 (J-STAGE)  Publication year： 2014 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： channel ,...
Semi thesaurus term： Impedance Spectroscopy

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JST classification (2)： Semiconductor integrated circuit  (NC03162T) ,  Biochemical analytical methods  (EA03030G)

Reference (11)：

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• (4) A. Uddin, K. Milaninia, C.-H. Chen, and L. Theogarajan: “Wafer Scale Integration of CMOS Chips for Biomedical Applications via Self-Aligned Masking”, IEEE Trans Compon Packaging Manuf Technol., Vol. 1, No. 12, pp. 1996-2004 (2011)
• (5) F. F. Mandy, M. Bergeron, and T. Minkus: “Principles of flow cytometry”, Transfusion Science, Vol. 16, No. 4, pp. 303-314 (1995)

Terms in the title (6)： 生物学 ,  応用 ,  SOI ,  LSI ,  微小流体チャネル ,  集積化