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J-GLOBAL ID:201402208165091088   Reference number:14A1213580

Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application.

生物学的応用のための厚いSOI LSIデバイスについての微小流体チャネル集積化
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Volume: 134  Issue: 10  Page: 320-325 (J-STAGE)  Publication year: 2014 
JST Material Number: L3098A  ISSN: 1341-8939  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Semiconductor integrated circuit  ,  Biochemical analytical methods 
Reference (11):
  • (1) V. Linder, S. Koster, W. Franks, T. Kraus, E. Verpoorte, F. Heer, A. Hierlemann, and N. F. de Rooij: “Microfluidics/CMOS orthogonal capabilities for cell biology”, Biomed Microdevices, Vol. 8, pp. 159-166 (2006)
  • (2) C. Küttel, E. Nascimento, N. Demierre, T. Silva, T. Braschler, P. Renaud, and A. G. Oliva: “Label-free detection of Babesia bovis infected red blood cells using impedance spectroscopy on a microfabricated flow cytometer”, Acta Trop., Vol. 102, No. 1, pp. 63-68 (2007)
  • (3) K. Ikuta, S. Maruo, T. Fujisawa, and A. Yamada: “Micro concentrator with opto-sense micro reactor for biochemical IC chip family. 3D composite structure and experimental verification”, Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999, MEMS '99, pp. 376-381 (1999)
  • (4) A. Uddin, K. Milaninia, C.-H. Chen, and L. Theogarajan: “Wafer Scale Integration of CMOS Chips for Biomedical Applications via Self-Aligned Masking”, IEEE Trans Compon Packaging Manuf Technol., Vol. 1, No. 12, pp. 1996-2004 (2011)
  • (5) F. F. Mandy, M. Bergeron, and T. Minkus: “Principles of flow cytometry”, Transfusion Science, Vol. 16, No. 4, pp. 303-314 (1995)
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