Art
J-GLOBAL ID:201402210263284484   Reference number:14A0657045

Surface effect on ion track formation in amorphous Si3N4 films

非晶質Si3N4膜におけるイオン軌跡形成に対する表面効果
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Material:
Volume: 315  Page: 142-145  Publication year: Nov. 15, 2013
JST Material Number: H0899A  ISSN: 0168-583X  Document type: Article
Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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