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J-GLOBAL ID:201402236804154006   Reference number:14A0806274

Feature-Based 3D Process Planning for MEMS Fabrication

MEMS製作のための特徴ベースの三次元プロセス計画
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Volume:Issue:Page: 406-419  Publication year: May. 05, 2014 
JST Material Number: L0997B  ISSN: 1881-7629  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Computer system development  ,  Manufacturing technology of solid-state devices 
Reference (15):
  • M. Gad-el-Hak, “Introduction (Chapter 1),” The MEMS Handbook. - MEMS Design and Fabrication (edited by M.Gad-el-Hak), Taylor & Fransis Group, pp. 1-1-1-5, 2006.
  • K. Ashida, S. Nakano, J. Park, and J. Akedo, “On-Demand MEMS Device Production System by Module-based Microfactory,” Int. J. of Automation Technology, Vol.4, No.2, pp. 110-116, 2010.
  • Micromachine Center, FY 2009 Reports on Research Studies, MicroNano, No.71, p. 8, 2009, http://www.mmc.or.jp/e/e-main.html [accessed Dec. 1, 2013]
  • P. M. Osternberg and S. D. Senturia, “MemsBuilder: An automated 3D solid model construction program for micro-electromechanical structures,” Proc. of 8th Int. Conf. on Solid-state Sensors and Actuators and EuroSensors IX, pp. 21-24, 1995.
  • H. Dixist, S. Kannapan, and D. L. Taylor, “3D geometric simulation of MEMS fabrication processes: A semantic approach,” Proc. of 4th ACM symp. on Solid Modeling and Application, pp. 376-386, 1997.
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