Art

J-GLOBAL ID：201402236804154006   Reference number：14A0806274

Feature-Based 3D Process Planning for MEMS Fabrication

MEMS製作のための特徴ベースの三次元プロセス計画

Author (3)： KANAI Satoshi (Hokkaido Univ., Sapporo, JPN) ,  SHIBATA Takayuki (Toyohashi Univ. Technol., Aichi, JPN) ,  KAWASHIMA Takahiro (Toyohashi Univ. Technol., Aichi, JPN)
Material： International Journal of Automation Technology  (Int J Autom Technol)
Volume： 8  Issue： 3  Page： 406-419  Publication year： May. 05, 2014 
JST Material Number： L0997B  ISSN： 1881-7629  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *three dimension ,  process ,  *MEMS ,  manufacturing ,  CAD ,  computer aided process planning ,  prototyping ,  solid model ,  morphology(form) ,  process planning
Semi thesaurus term： CAPP system ,  Micro Electro Mechanical System device ,  prototyping ,  computer aided design ,  3D shape ,  manufacturing ,  *process plan

JST classification (2)： Computer system development  (JD02010R) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (15)：

• M. Gad-el-Hak, “Introduction (Chapter 1),” The MEMS Handbook. - MEMS Design and Fabrication (edited by M.Gad-el-Hak), Taylor & Fransis Group, pp. 1-1-1-5, 2006.
• K. Ashida, S. Nakano, J. Park, and J. Akedo, “On-Demand MEMS Device Production System by Module-based Microfactory,” Int. J. of Automation Technology, Vol.4, No.2, pp. 110-116, 2010.
• Micromachine Center, FY 2009 Reports on Research Studies, MicroNano, No.71, p. 8, 2009, http://www.mmc.or.jp/e/e-main.html [accessed Dec. 1, 2013]
• P. M. Osternberg and S. D. Senturia, “MemsBuilder: An automated 3D solid model construction program for micro-electromechanical structures,” Proc. of 8th Int. Conf. on Solid-state Sensors and Actuators and EuroSensors IX, pp. 21-24, 1995.
• H. Dixist, S. Kannapan, and D. L. Taylor, “3D geometric simulation of MEMS fabrication processes: A semantic approach,” Proc. of 4th ACM symp. on Solid Modeling and Application, pp. 376-386, 1997.

Terms in the title (4)： MEMS ,  製作 ,  プロセス ,  計画