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J-GLOBAL ID:201402269382030096   Reference number:14A1154329

Flow Disturbance Suppression for Pneumatic Active Anti-Vibration Apparatus Considering Transmissibility

除振率を考慮した空圧式アクティブ除振装置に対する流量外乱の一抑制法
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Volume: 134  Issue:Page: 1182-1190 (J-STAGE)  Publication year: 2014 
JST Material Number: S0810A  ISSN: 0385-4221  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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System design and analysis 
Reference (23):
  • (1) H. Butler: “Position Control in Lithographic Equipment”, IEEE Control Systems Magazine, Vol. 31, No. 5, pp. 28-47 (2011)
  • (2) H. Pu, X. Luo, and X. Chen: “Modeling and Analysis of Dual-Chamber Pneumatic Spring with Adjustable Damping for Precision Vibration Isolation”, Journal of Sound and Vibration, Vol. 330, No. 15, pp. 3578-3590 (2011)
  • (3) Y. H. Shin and K. J. Kim: “Performance Enhancement of Pneumatic Vibration Isolation Tables in Low Frequency Range by Time Delay Control”, Journal of Sound and Vibration, Vol. 321, No. 3-5, pp. 537-553 (2009)
  • (4) E. I. Rivin: “Vibration Isolation of Precision Equipment”, Precision Engineering, Vol. 17, No. 1, pp. 41-56 (1995)
  • (5) H. Shirani and S. Wakui: “Control of an Isolated Table's Fluctuation Caused by Supplied Air Pressure Using a Voice Coil Motor”, Journal of System Design and Dynamics, Vol. 4, No. 3, pp. 406-415 (2010)
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