Art

J-GLOBAL ID：201402280042553411   Reference number：14A0036933

Hyperthermal atomic oxygen beam irradiation effect on the Ti-containing DLC film

Tiを含むDLC膜に対する高温原子状酸素ビーム照射効果

Author (8)： KANDA Kazuhiro (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo, JPN) ,  FUKUDA Kazuhiro (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo, JPN) ,  KIDENA Kengo (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo, JPN) ,  IMAI Ryo (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo, JPN) ,  NIIBE Masahito (Lab. of Advanced Sci. and Technol. for Ind., Univ. of Hyogo, JPN) ,  FUJIMOTO Synya (Fac. of Engineering, Kobe Univ., JPN) ,  YOKOTA Kumiko (Fac. of Engineering, Kobe Univ., JPN) ,  TAGAWA Masahito (Fac. of Engineering, Kobe Univ., JPN)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 41  Page： 49-52  Publication year： Jan. 2014 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *DLC film ,  *Oxygen ,  oxygen beam ,  ion irradiation ,  Titanium ,  synchrotron radiation ,  XANES ,  evaporated film ,  oxidation ,  titanium oxide ,  radiation effect ,  diamond-like carbon ,  plasma CVD ,  C-C bond ,  alkyne ,  alkane ,  NEXAFS ,  titanium dioxide ,  *atomic oxygen ,  irradiation effect
Semi thesaurus term： carbon-carbon bond

JST classification (2)： Thin films of other inorganic compounds  (BK14060A) ,  Irradiational changes of other materials  (BK16124V)

Substance index (2)： Acetylene ,  Methane

Terms in the title (5)： Ti ,  DLC膜 ,  原子状酸素 ,  ビーム ,  照射効果