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J-GLOBAL ID：201402299540046970   Reference number：14A0045526

Pixel length calibration using a pattern matching method for secondary-electron images

パターンマッチング法を用いた二次電子像用のピクセル長キャリブレーション
Author (3)：
SUGAWARA Kentaro

About SUGAWARA Kentaro

(National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN

, 
MISUMI Ichiko

About MISUMI Ichiko

(National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN

, 
GONDA Satoshi

About GONDA Satoshi

(National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)

About National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN


Material：
Proceedings of SPIE  (Proceedings. SPIE - The International Society for Optical Engineering)

About Proceedings of SPIE


Volume： 8769  Issue： Pt.1  Page： 876909.1-876909.6  Publication year： 2013 
JST Material Number： D0943A  ISSN： 0277-786X  CODEN： PSISDG  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*grain size analysis

About grain size analysis

, 
image

About image

, 
calibration

About calibration

, 
interferometer

About interferometer

, 
positioning device

About positioning device

, 
image processing

About image processing

, 
*pattern matching

About pattern matching

, 
computer code

About computer code

, 
character(group theory)

About character(group theory)

, 
scanning electron microscope

About scanning electron microscope

, 
nano particle

About nano particle

, 
laser interferometer

About laser interferometer


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
SEM image

About SEM image

, 
X-Y stage

About X-Y stage

, 
analysis software

About analysis software

, 
uncertainty budget

About uncertainty budget

, 
particle sizing

About particle sizing


JST classification (2)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

About Measuring methods and instruments of length,area,cross section,volume,angle

,  Pattern recognition 
(JE07000S)

About Pattern recognition

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
パターンマッチング

About パターンマッチング

, 
二次電子

About 二次電子

, 
ピクセル

About ピクセル

, 
キャリブレーション

About キャリブレーション


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