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J-GLOBAL ID:201502200378100711   Reference number:15A0780796

Patterned ZrO2/MTiO3 (M=Ca, Sr, Ba) films in micrometer scale prepared by anodic oxidation of titanium under spark discharge

火花放電アノード酸化によるZrO2/MTiO3(M=Ca,Sr,Ba)マイクロパターニング膜の作製
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Volume: 33  Issue:Page: 43-49  Publication year: May. 25, 2015 
JST Material Number: Y0644A  ISSN: 0289-7709  CODEN: MTECFQ  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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All keywords is available on JDreamIII(charged).
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Manufacturing technology of solid-state devices 

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