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J-GLOBAL ID:201502202830745167   Reference number:15A1339687

ここまで進んだ超音波加工技術 Siウエハの超音波援用固定砥粒化学的機械研磨(UF-CMP)=アブレシブペレット寿命における超音波振動の効果=

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Volume: 27  Issue:Page: 36-39  Publication year: Dec. 01, 2015 
JST Material Number: L2344A  ISSN: 0916-2410  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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