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J-GLOBAL ID:201502204276860555   Reference number:15A1339685

ここまで進んだ超音波加工技術 二次元(楕円)超音波微振動を援用した高能率研削=単結晶サファイアのスパイラル超音波援用研削=

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Volume: 27  Issue:Page: 27-31  Publication year: Dec. 01, 2015 
JST Material Number: L2344A  ISSN: 0916-2410  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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