Art

J-GLOBAL ID：201502210821307699   Reference number：15A0866593

Micro Drilling Simulation of Ultra-Short Pulsed Laser Ablation of Glass

ガラスの超短パルスレーザアブレーションの微細穴あけシミュレーション

Author (1)： MOTOMURA Fumitaka (Nagasaki Univ., Nagasaki, JPN)
Material： International Journal of Automation Technology  (Int J Autom Technol)
Volume： 9  Issue： 4  Page： 418-424  Publication year： Jul. 05, 2015 
JST Material Number： L0997B  ISSN： 1881-7629  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： glass ,  *ultrashort pulse laser ,  *laser ablation ,  *simulation ,  drilling(cutting) ,  groove ,  depth ,  dielectric function ,  dielectrics ,  absorption coefficient ,  fluence ,  pulse duration
Semi thesaurus term： complex dielectric function

JST classification (2)： Applications of lasers  (BD04100V) ,  Special machining  (QC04000Y)

Reference (14)：

• J. R. Vazquez de Aldana, C. Mendez, L. Roso, and P. Moreno, “Propagation of ablation channels with multiple femtosecond laser pulses in dielectrics: numerical simulations and experiments,” J. of Phys. D: Applied Physics, Vol.38, pp. 2764-2768, 2005.
• M. Sun, U. Eppelt, S. Russ, C. Hartmann, C. Siebert, J. Zhu, and W. Schulz, “Numerical analysis of ablation and damage in glass with multiple picosecond laser pulses,” Optics Express, Vol.21, No.7, pp. 7858-7868, 2013.
• L. Jiang and H. L. Tsai, “A plasma model combination with improved two-temperature equation for ultrafast ablation of dielectrics,” J. of Applied Physics, Vol.104, pp. 093101-1-8, 2008.
• L. Jiang and H. L. Tsai, “Energy transport and material removal in wide bandgap materials by a femtosecond laser pulse,” I. J. Heat and Mass Transfer, Vol.48, pp. 487-499, 2005.
• L. Jiang and H. L. Tsai, “Improved Two-emperature Model and Its Application in Ultrashort Laser Heating of Metal Films,” J. Heat Transfer, Vol.127, pp. 1167-1173, 2005.

Terms in the title (5)： ガラス ,  短パルスレーザ ,  アブレーション ,  微細穴 ,  シミュレーション