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J-GLOBAL ID:201502214333208792   Reference number:15A1047626

大気圧マイクロプラズマによるDLC局所成長

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Material:
Volume: 76th  Page: ROMBUNNO.16P-2Q-5  Publication year: Aug. 31, 2015 
JST Material Number: Y0055B  ISSN: 2758-4704  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thin films of other inorganic compounds 
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