Art

J-GLOBAL ID：201502224270161388   Reference number：15A0446973

Origin analysis of thermal neutron soft error rate at nanometer scale

ナノメータスケールにおける熱中性子ソフトエラー率の成因分析

Author (9)： YAMAZAKI Takashi (Product & System Engineering Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, JPN) ,  KATO Takashi (Reliability Engineering Dep., Fujitsu Semiconductor Ltd., 50 Fuchigami, Akiruno 197-0833, JPN) ,  UEMURA Taiki (Reliability Engineering Dep., Fujitsu Semiconductor Ltd., 50 Fuchigami, Akiruno 197-0833, JPN) ,  MATSUYAMA Hideya (Reliability Engineering Dep., Fujitsu Semiconductor Ltd., 50 Fuchigami, Akiruno 197-0833, JPN) ,  TADA Yoko (Product & System Engineering Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, JPN) ,  YAMAZAKI Kazutoshi (Devices & Materials Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, JPN) ,  SOEDA Takeshi (Product & System Engineering Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, JPN) ,  MIYAJIMA Toyoo (Product & System Engineering Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, JPN) ,  KATAOKA Yuji (Product & System Engineering Laboratories, Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, JPN)
Material： Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)
Volume： 33  Issue： 2  Page： 020604-020604-4  Publication year： Mar. 2015 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： solid state device ,  *soft error ,  *error rate ,  *secondary ion mass spectrometry ,  *thermal neutron ,  TOF ,  *boron isotope ,  *SRAM ,  *borosilicate glass ,  alpha particle ,  *radiation effect
Semi thesaurus term： *BPSG (glass) ,  *Soft Error Rate ,  *boron 10 ,  electronic device ,  Time-of-Flight Secondary Ion Mass Spectrometry

JST classification (3)： Measurement,testing and reliability of solid-state devices  (NC03040G) ,  Irradiational changes semiconductors  (BK16123E) ,  Semiconductor integrated circuit  (NC03162T)

Terms in the title (4)： 熱中性子 ,  ソフトエラー率 ,  成因 ,  分析