Art

J-GLOBAL ID：201502238335640964   Reference number：15A0689296

A design method for an unbalance vibration compensator of five-axes active magnetic bearing systems

5軸能動形磁気軸受の不釣り合い振動補償器に対する一設計法

Author (2)： NAKAMURA TAIKI (東京農工大 大学院) ,  WAKUI SHINJI (東京農工大 大学院工学研究院)
Material： 日本機械学会論文集(Web)  (Bulletin of the JSME (Web))
Volume： 81  Issue： 824  Page： 14-00532(J-STAGE)  Publication year： 2015 
JST Material Number： U0182B  ISSN： 2187-9761  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： magnetic bearing ,  *oscillation ,  *compensator (electric) ,  attenuation ,  *phase stabilization ,  design method ,  *bearing rigidity ,  turbo molecular pump ,  slide bearing
Semi thesaurus term： turbo molecular pump ,  *active magnetism bearing ,  semiconductor manufacturing equipment

JST classification (1)： Bearings  (QB01020W)

Reference (12)：

• Azuma, T., Kanemitsu, Y., Takahashi, N., Fukushima, Y. and Matsushita, O., Magnetic bearing guidebook for rotating machine designers, Japan Industrial Publishing (2004), pp.91-94 (in Japanese).
• Fan, Q., Nonami, K. and Ueyama, H., Unbalance vibration control of magnetic bearing systems using adaptive algorithm with disturbance frequency estimation, Transactions of the Japan Society of Mechanical Engineers, Series C, Vol.63, No.609 (1997), pp.1448-1454 (in Japanese).
• Habermann, H., Brunet, M. and Joly, P., Device for compensating synchronous disturbances in the magnetic suspension of a rotor, United States Patent 4121143 (1978b).
• Habermann, H., Brunet, M. and Joly, P., Device for damping the critical frequencies of a rotor suspended by a radial electromagnetic bearing, United States Patent 4128795 (1978a).
• Matsui, J., Sirai, K. and Kurokawa, J., Numerical simulation of two dimensional flow in the turbo molecular pump, Transactions of the Japan Society of Mechanical Engineers, Series B, Vol.67, No.661 (2001), pp.2159-2165 (in Japanese).

Terms in the title (4)： 磁気軸受 ,  釣り合い ,  補償器 ,  設計法