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J-GLOBAL ID：201502271080245826   Reference number：15A0434657

CRYSTALLIZATION PROPERTIES OF CeO2 THIN FILMS DEPOSITED BY MOCVD WITH ADDITIONAL TEOS INTRODUCTION

余分にTEOSを導入したMOCVDにより蒸着したCeO2薄膜の結晶化特性
Author (7)：
FURUYA T.

About FURUYA T.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
SATO T.

About SATO T.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
MATSUMURA T.

About MATSUMURA T.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
OKABE Y.

About OKABE Y.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN

, 
SUZUKI S.

About SUZUKI S.

(Comet Inc., Ibaraki, JPN)

About Comet Inc., Ibaraki, JPN

, 
ISHIBASHI K.

About ISHIBASHI K.

(Comet Inc., Ibaraki, JPN)

About Comet Inc., Ibaraki, JPN

, 
YAMAMOTO Y.

About YAMAMOTO Y.

(Hosei Univ., Tokyo, JPN)

About Hosei Univ., Tokyo, JPN


Material：
Report of Research Center of Ion Beam Technology, Hosei University. Supplement  (法政大学イオンビーム工学研究所報告 別冊)

About Report of Research Center of Ion Beam Technology, Hosei University. Supplement


Issue： 33  Page： 70-76  Publication year： Mar. 2015 
JST Material Number： L0263A  ISSN： 0914-2908  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*MOCVD

About MOCVD

, 
*cerium oxide

About cerium oxide

, 
silicon dioxide

About silicon dioxide

, 
substrate temperature

About substrate temperature

, 
annealing(heat treatment)

About annealing(heat treatment)

, 
X-ray photoelectron spectroscopy

About X-ray photoelectron spectroscopy

, 
*silicate

About silicate

, 
X-ray diffractometry

About X-ray diffractometry

, 
crystallization

About crystallization

, 
evaporated film

About evaporated film

, 
aliphatic alcohol

About aliphatic alcohol

, 
inorganic acid ester

About inorganic acid ester


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
post annealing

About post annealing


JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Tetraethoxysilane

About Tetraethoxysilane

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
TEOS

About TEOS

, 
MOCVD

About MOCVD

, 
蒸着

About 蒸着

, 
薄膜

About 薄膜

, 
結晶化

About 結晶化


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