Art
J-GLOBAL ID：201602015807632250   Reference number：71A0013393

The step-and-repeat camera.

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Author (8)：
ALLES D S

About ALLES D S

, 
ELEK J W

About ELEK J W

, 
HOWLAND F L

About HOWLAND F L

, 
NEVIS B

About NEVIS B

, 
NIELSEN R J

About NIELSEN R J

, 
SCHLEGEL W A

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, 
SKINNER J G

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, 
STOUT C E Jr

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Material：
Bell Syst Tech J  (Bell System Technical Journal)

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Volume： 49  Issue： 9  Page： 2145-2177  Publication year： 1970 
JST Material Number： B0062A  ISSN： 0005-8580  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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フォトマスク

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, 
干渉計

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, 
集積回路

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Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
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