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J-GLOBAL ID:201602212629649297   Reference number:16A1299350

磁場-パルスプラズマ援用化学気相成長法における環境セル用a-SiCN隔膜のパルスパラメータ依存性

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Volume: 2016  Page: ROMBUNNO.G6-8  Publication year: Nov. 07, 2016 
JST Material Number: L2273B  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Microscopic methods of living organisms  ,  Microscopy determination of structures 

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