Art

J-GLOBAL ID：201602232613246506   Reference number：16A0782525

Long-term irradiation effects of visible light on amorphous carbon nitride films

非晶質窒化炭素膜に及ぼす可視光の長期照射の影響

Author (5)： Harata Tomo (Department of Materials Science and Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan) ,  Aono Masami (Department of Materials Science and Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan) ,  Miyazaki Hisashi (Department of Materials Science and Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan) ,  Kitazawa Nobuaki (Department of Materials Science and Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan) ,  Watanabe Yoshihisa (Department of Materials Science and Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 63  Page： 132-135  Publication year： Mar. 2016 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： carbon compound ,  nitride ,  thin film ,  magnetron sputtering ,  substrate (plate) ,  silicon dioxide ,  *photoirradiation ,  pulsed light source ,  visible light ,  monochromatic light ,  continuous wave ,  deformation ,  chemical bond ,  X-ray photoelectron spectroscopy ,  defect density ,  lattice defect ,  ESR ,  stability ,  utilization ,  microactuator
Semi thesaurus term： *非晶質窒化炭素膜 ,  *光誘起変形 ,  光駆動マイクロアクチェエータ

Author keywords (5)： Amorphous ,  Carbon nitride ,  Sputtering ,  Photo-mechanical ,  Actuators

JST classification (4)： Nitrogen and its compounds  (YB02050S) ,  Thin films of other inorganic compounds  (BK14060A) ,  Other optical effects  (BM08040H) ,  Design,manufacturing,and components of robots  (IC04013A)

Terms in the title (5)： 非晶質 ,  窒化 ,  炭素膜 ,  可視光 ,  長期照射