Art
J-GLOBAL ID：201602250146175065   Reference number：16A1280669

マイクロピラーアレイを用いた高感度MEMS気流せん断応力センサ

Author (6)：
TAKAHASHI HIDETOSHI

About TAKAHASHI HIDETOSHI

(東大)

About 東大

, 
KAZAMA RYOHEI

About KAZAMA RYOHEI

(東大)

About 東大

, 
NGUYEN Thanh-Vinh

About NGUYEN Thanh-Vinh

(東大)

About 東大

, 
TAKAHATA TOMOYUKI

About TAKAHATA TOMOYUKI

(東大)

About 東大

, 
MATSUMOTO KIYOSHI

About MATSUMOTO KIYOSHI

(東洋大)

About 東洋大

, 
SHIMOYAMA ISAO

About SHIMOYAMA ISAO

(東大)

About 東大


Material：
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)  (センサ・マイクロマシンと応用システムシンポジウム論文集(CD-ROM))

About センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)


Volume： 33rd  Page： ROMBUNNO.25am2-PS-059  Publication year： 2016 
JST Material Number： X0768B  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
micro structure

About micro structure

, 
columnar crystal

About columnar crystal

, 
high sensitivity

About high sensitivity

, 
sensor

About sensor

, 
*MEMS

About MEMS

, 
air flow(meteorology)

About air flow(meteorology)

, 
*shearing stress

About shearing stress

, 
electric resistance

About electric resistance

, 
*piezoresistance effect

About piezoresistance effect

, 
frictional resistance

About frictional resistance


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
MEMS sensor

About MEMS sensor

, 
micropillar

About micropillar

, 
*piezoresistance

About piezoresistance

, 
stress sensing cube

About stress sensing cube


JST classification (2)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of force,work load,pressure,friction 
(AD05050V)

About Measuring methods and instruments of force,work load,pressure,friction

,  Experimental,test,measuring techniques and their apparatuses of fluids 
(BC01020K)

About Experimental,test,measuring techniques and their apparatuses of fluids

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
ピラーアレイ

About ピラーアレイ

, 
高感度

About 高感度

, 
MEMS

About MEMS

, 
気流

About 気流

, 
せん断応力

About せん断応力


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