Art

J-GLOBAL ID：201602275001865325   Reference number：16A0841198

A periodic magnetic field assisted chemical vapor deposition technique to fabricate diamond film with preferred orientation

優先配向を有するダイヤモンド膜を作製する周期的磁場支援化学蒸着

Author (13)： Wang Yijia (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Wang Yijia (State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, PR China) ,  Li Jiaxin (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Long Hangyu (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Long Hangyu (State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, PR China) ,  Luo Hao (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Zhou Bo (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Xie Youneng (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Li Shasha (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Wei Qiuping (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Wei Qiuping (State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, PR China) ,  Yu Zhiming (School of Materials Science and Engineering, Central South University, Changsha 410083, PR China) ,  Yu Zhiming (State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, PR China)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 292  Page： 49-53  Publication year： Apr. 25, 2016 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *thin film ,  *preferred orientation ,  *chemical vapor deposition ,  *magnetic field ,  wafer ,  frequency (Hz) ,  crystal orientation ,  field emission ,  magnetic field effect ,  microcrystal ,  *diamond film ,  angular frequency ,  Si wafer ,  alkane
Semi thesaurus term： silicon substrate ,  *磁場支援化学蒸着 ,  hot filament chemical vapor deposition ,  HFCVD

Author keywords (5)： Chemical vapor deposition ,  Periodic magnetic field ,  Diamond film ,  Preferred orientation ,  Electron field emission

JST classification (2)： Thin films of other inorganic compounds  (BK14060A) ,  Carbon and its compounds  (YB02060D)

Substance index (1)： Methane

Terms in the title (6)： 優先配向 ,  ダイヤモンド膜 ,  作製 ,  磁場 ,  支援 ,  化学蒸着