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J-GLOBAL ID：201602276869225580   Reference number：16A0679353

Experimental study of nanoscale Co damascene BEOL interconnect structures

ナノスケールCoダマシンBEOL相互接続構造の実験的研究【Powered by NICT】

Author (17)： Kelly J. (IBM Research at Albany Nanotech, NY USA) ,  Chen J. H.-C. (IBM Research at Albany Nanotech, NY USA) ,  Huang H. (IBM Research at Albany Nanotech, NY USA) ,  Hu C. K. (IBM Research at Albany Nanotech, NY USA) ,  Liniger E. (IBM Research at Albany Nanotech, NY USA) ,  Patlolla R. (IBM Research at Albany Nanotech, NY USA) ,  Peethala B. (IBM Research at Albany Nanotech, NY USA) ,  Adusumilli P. (IBM Research at Albany Nanotech, NY USA) ,  Shobha H. (IBM Research at Albany Nanotech, NY USA) ,  Nogami T. (IBM Research at Albany Nanotech, NY USA) ,  Spooner T. (IBM Research at Albany Nanotech, NY USA) ,  Huang E. (IBM Research at Albany Nanotech, NY USA) ,  Edelstein D. (IBM Research at Albany Nanotech, NY USA) ,  Canaperi D. (IBM Research at Albany Nanotech, NY USA) ,  Kamineni V. (GLOBALFOUNDRIES, Albany, NY USA) ,  Mont F. (GLOBALFOUNDRIES, Albany, NY USA) ,  Siddiqui S. (GLOBALFOUNDRIES, Albany, NY USA)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2016  Issue： IITC/AMC  Page： 40-42  Publication year： 2016 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： We characterize integrated dua...

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Thesaurus term： continuity ,  Copper ,  residual ,  wiring ,  *Cobalt ,  dielectrics ,  characterization ,  *interconnection ,  copper wire ,  *nano scale
Semi thesaurus term： バリア層 ,  デュアルダマシン ,  実験研究 ,  *BEOL ,  *ダマシン , 【Automatic Indexing@JST】

JST classification (2)： Wire communication systems and equipment  (ND09000H) ,  Speach processing  (JE05000E)

Terms in the title (6)： ナノスケール ,  CO ,  ダマシン ,  BEOL ,  相互接続 ,  実験的研究