Art
J-GLOBAL ID：201602279430153074   Reference number：16A1319006

Investigation of high-k/metal gate MOS capacitors annealed by microwave annealing as a post-metal annealing process

ポスト金属アニーリングプロセスとしてのマイクロ波アニーリングによりアリールした高k/金属ゲートMOSキャパシタの研究【Powered by NICT】
Author (4)：
Su Yin-Hsien

About Su Yin-Hsien

(Department of Electrical Engineering National Cheng Kung University, Tainan 70155, Taiwan, R. O. C.)

About Department of Electrical Engineering National Cheng Kung University, Tainan 70155, Taiwan, R. O. C.

, 
Kuo Tai-Chen

About Kuo Tai-Chen

(Department of Electrical Engineering National Cheng Kung University, Tainan 70155, Taiwan, R. O. C.)

About Department of Electrical Engineering National Cheng Kung University, Tainan 70155, Taiwan, R. O. C.

, 
Lee Wen-Hsi

About Lee Wen-Hsi

(Department of Electrical Engineering National Cheng Kung University, Tainan 70155, Taiwan, R. O. C.)

About Department of Electrical Engineering National Cheng Kung University, Tainan 70155, Taiwan, R. O. C.

, 
Lee Yao-Ren

About Lee Yao-Ren

(National Nano Device Laboratories, Hsinchu 30010, Taiwan, R. O. C.)

About National Nano Device Laboratories, Hsinchu 30010, Taiwan, R. O. C.


Material：
IEEE Conference Proceedings  (IEEE Conf Proc)

About IEEE Conference Proceedings


Volume： 2016  Issue： NANO  Page： 773-776  Publication year： 2016 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
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Japanese summary of the article(about several hundred characters).
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MOSFETs with high-k and metal ...
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Thesaurus term：
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Aluminum

About Aluminum

, 
*condenser (capacitor)

About condenser (capacitor)

, 
oxide

About oxide

, 
RTA

About RTA

, 
*microwave

About microwave

, 
leakage current

About leakage current

, 
MOSFET

About MOSFET

, 
simulated annealing

About simulated annealing

, 
*annealing (heat treatment)

About annealing (heat treatment)

, 
breakdown voltage

About breakdown voltage

, 
interface state density

About interface state density

, 
equivalent oxide thickness

About equivalent oxide thickness

, 
interlayer

About interlayer


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*MOSコンデンサ

About MOSコンデンサ

, 
*メタルゲート

About メタルゲート

, 【Automatic Indexing@JST】
JST classification (3)：
JST classification
Category name(code) classified by JST.
Signal theory 
(ND02020G)

About Signal theory

,  Semiconductor integrated circuit 
(NC03162T)

About Semiconductor integrated circuit

,  Graphic and image processing in general 
(JE04010I)

About Graphic and image processing in general

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
アニーリング

About アニーリング

, 
プロセス

About プロセス

, 
マイクロ波

About マイクロ波

, 
金属ゲート

About 金属ゲート

, 
MOSキャパシタ

About MOSキャパシタ

, 
研究

About 研究


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