Art

J-GLOBAL ID：201602280205631373   Reference number：16A0939104

Three-point-support method based on position determination of supports and wafers to eliminate gravity-induced deflection of wafers

ウエハの重力誘起曲げを除去するための,サポートとウエハの位置決定に基づく3点支持法

Author (5)： Liu Haijun (Key Laboratory for Precision and Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian, PR China) ,  Zhu Xianglong (Key Laboratory for Precision and Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian, PR China) ,  Kang Renke (Key Laboratory for Precision and Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian, PR China) ,  Dong Zhigang (Key Laboratory for Precision and Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian, PR China) ,  Chen Xiuyi (Key Laboratory for Precision and Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian, PR China)
Material： Precision Engineering  (Precis Eng)
Volume： 46  Page： 339-348  Publication year： Oct. 2016 
JST Material Number： A0734B  ISSN： 0141-6359  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *supporting structure ,  semiconductor laser ,  *wafer ,  positioning ,  system ,  panel ,  effect ,  measurement ,  Uncertainty ,  contour ,  gravity effect ,  positioning device system
Semi thesaurus term： laser diode ,  positioning device system

Author keywords (4)： Three-point-support method ,  Position determination ,  Gravity-induced deflection ,  Large and thin panels

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (6)： ウエハ ,  重力 ,  誘起 ,  曲げ ,  位置決定 ,  支持