Art

J-GLOBAL ID：201602282831711304   Reference number：16A0911540

Structural, mechanical and optical properties of thin films deposited from a graphitic carbon nitride target

グラファイト状窒化炭素ターゲットから堆積した薄膜の構造,機械的および光学特性

Author (6)： Kaushik Neelam (World Premier Initiative (WPI) Center, Advanced Institute for Materials Research, Tohoku University, Sendai, Japan) ,  Sharma Parmanand (Institute for Materials Research, Tohoku University, Sendai, Japan) ,  Nishijima Masahiko (Institute for Materials Research, Tohoku University, Sendai, Japan) ,  Makino Akihiro (Tohoku University, Sendai, Japan) ,  Esashi Masayoshi (World Premier Initiative (WPI) Center, Advanced Institute for Materials Research, Tohoku University, Sendai, Japan) ,  Tanaka Shuji (Graduate School of Engineering, Tohoku University, Sendai, Japan)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 66  Page： 149-156  Publication year： Jun. 2016 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *carbon compound ,  *nitride ,  *pulsed laser deposition ,  *thin film ,  target ,  substrate(plate) ,  silicon ,  silica glass ,  transparent material ,  *band gap ,  nanoindentation ,  *hardness ,  *Young's modulus ,  amorphous state ,  chemical composition
Semi thesaurus term： *CNx ,  PLD(deposition) ,  fused quartz

Author keywords (3)： Carbon nitride ,  Thin film ,  Laser deposition

JST classification (4)： Thin films of other inorganic compounds  (BK14060A) ,  Crystal structure of other inorganic compounds  (BK07030J) ,  Mechanical properties of solids in general  (BL01021C) ,  Visible and ultraviolet spectra of inorganic compounds  (BM08084P)

Terms in the title (5)： グラファイト状窒化炭素 ,  ターゲット ,  堆積 ,  薄膜 ,  光学特性