Art

J-GLOBAL ID：201702213058224529   Reference number：17A1615060

Structural analyses and reverse Monte Carlo modeling of niobium oxide amorphous film prepared by sputtering method

スパッタリング法により調製した酸化ニオブ非晶質膜の構造解析および逆モンテカルロモデリング

Author (6)： SAJIKI Go (Technological, educational supporting center in Takamatsu, National Institute of Technology, Kagawa College) ,  BENINO Yasuhiko (Graduate School of Environmental and Life Science, Okayama University) ,  OKI Chinatsu (Graduate School of Environmental and Life Science, Okayama University) ,  OHARA Koji (Japan Synchrotron Radiation Research Institute) ,  OKANO Hiroshi (General Education in Takamatsu, National Institute of Technology, Kagawa College) ,  NANBA Tokuro (Graduate School of Environmental and Life Science, Okayama University)
Material： Journal of the Ceramic Society of Japan (Web)  (J Ceram Soc Jpn (Web))
Volume： 125  Issue： 10  Page： 760-765(J-STAGE)  Publication year： 2017 
JST Material Number： U0409A  ISSN： 1348-6535  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Abstract/Point： Structural analyses of niobium...

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Thesaurus term： substrate(plate) ,  *niobium oxide ,  *thin film ,  *amorphous state ,  oxide ,  magnetron sputtering ,  *reactive sputtering ,  target ,  niobium ,  oxygen ,  argon ,  *structure analysis ,  *crystal structure ,  chemical composition ,  polyhedron ,  *model ,  numerical analysis ,  *simulation
Semi thesaurus term： *reverse Monte Carlo method ,  *Models, Structural ,  oxide thin film ,  amorphous thin film

Author keywords (8)： Structural analysis ,  Amorphous film ,  Niobium oxide ,  Synchrotron radiation ,  High energy X-ray diffraction ,  X-ray absorption fine structure ,  Reverse Monte Carlo simulation ,  Bond valence sum

JST classification (2)： Oxide thin films  (BK14050P) ,  Crystal structure of metal oxides and chalcogenides  (BK07020Y)

Reference (41)：

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Terms in the title (7)： スパッタリング法 ,  調製 ,  酸化ニオブ ,  非晶質膜 ,  構造解析 ,  モンテカルロ ,  モデリング