Art
J-GLOBAL ID:201702213078198762   Reference number:17A1021431

Effect of chlorine doping on tribological properties of amorphous carbon films deposited by plasma-based ion implantation and deposition

プラズマ基イオン注入兼蒸着で蒸着した非晶質炭素膜のトライボロジー特性に及ぼす塩素ドーピングの影響【Powered by NICT】
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Material:
Volume: 113  Page: 377-382  Publication year: 2017 
JST Material Number: E0409B  ISSN: 0301-679X  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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JST classification (2):
JST classification
Category name(code) classified by JST.
Lubrication in general  ,  Carbon and its compounds 

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