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J-GLOBAL ID：201702213770172004   Reference number：17A0311629

An MEMS-based multiple electro-rheological bending actuator system with an alternating pressure source

交互圧力源を有するMEMSベース多重電気レオロジー曲げアクチュエータシステム【Powered by NICT】

Author (5)： Miyoshi Tomoya (Graduate School, Tokyo Institute of Technology, R2-42, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan) ,  Yoshida Kazuhiro (Precision and Intelligence Laboratory, Tokyo Institute of Technology, R2-42, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan) ,  Kim Joon-wan (Precision and Intelligence Laboratory, Tokyo Institute of Technology, R2-42, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan) ,  Eom Sang In (Precision and Intelligence Laboratory, Tokyo Institute of Technology, R2-42, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan) ,  Yokota Shinichi (Precision and Intelligence Laboratory, Tokyo Institute of Technology, R2-42, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 245  Page： 68-75  Publication year： Jul. 01, 2016 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： This paper presents a novel ME...

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Thesaurus term： high speed ,  silicon ,  *electrorheology ,  control system ,  fine patterning ,  microactuator ,  synchronous control ,  *MEMS ,  *actuator ,  regulating valve
Semi thesaurus term： 印加電圧 ,  マイクロバルブ ,  三次元構造 ,  油圧アクチュエータ ,  *圧力源 , 【Automatic Indexing@JST】

Author keywords (5)： Microactuator ,  Alternating pressure source ,  Multiple actuator system ,  Electro-rheological fluid (ERF) ,  MEMS

JST classification (4)： Piping fittings,valves  (QD05020E) ,  Design,manufacturing,and components of robots  (IC04013A) ,  Fluidic control equipment  (IC02030J) ,  Hydraulic and pneumatic equipment  (QD04020X)

Terms in the title (6)： 圧力源 ,  MEMS ,  多重 ,  電気レオロジー ,  曲げ ,  アクチュエータ