Art

J-GLOBAL ID：201702226160100544   Reference number：17A1013117

Nucleation of Cu₂Te layer by a closed space sublimation method toward the growth of Te based chalcopyrite

Te系カルコパイライトの成長に向けた閉空間昇華法によるCu₂Te層の核形成

Author (3)： Sakurakawa Yohei (Department of Electrical Engineering and Bioscience, Waseda University, 3-4-1, Okubo, Shinjuku-ku, Tokyo 169-8555, Japan) ,  Uruno Aya (Department of Electrical Engineering and Bioscience, Waseda University, 3-4-1, Okubo, Shinjuku-ku, Tokyo 169-8555, Japan) ,  Kobayashi Masakazu (Department of Electrical Engineering and Bioscience, Waseda University, 3-4-1, Okubo, Shinjuku-ku, Tokyo 169-8555, Japan and Kagami Memorial Research Institute for Materials Science and Technology, Waseda University, 2-8-26, Nishi Waseda, Shinjuku-ku, Tokyo 169-0051, Japan)
Material： Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)
Volume： 35  Issue： 4  Page： 04F106-04F106-4  Publication year： Jul. 2017 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *sublimation ,  *telluride(chalcogenide) ,  *copper compound ,  *nucleation ,  substrate(plate) ,  silicon ,  X-ray diffraction ,  scanning electron microscope ,  substrate temperature ,  *preferred orientation ,  crystal orientation ,  *vapor phase growth ,  *thin film growth
Semi thesaurus term： nucleation ,  scanning electron microscope

JST classification (1)： Thin films of other inorganic compounds  (BK14060A)

Terms in the title (5)： Te ,  成長 ,  閉空間 ,  昇華 ,  核形成