About Takeshita Toshihiro
About National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
About Yamashita Takahiro
About National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
About Makimoto Natsumi
About National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
About Kobayashi Takeshi
About National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
About IEEE Conference Proceedings
Please login to MyJ-GLOBAL to see full information. You also need to select "Display abstract, etc. of medical articles" in your MyJ-GLOBAL account page in order to see abstracts, etc. of medical articles.
About flexible circuit board
About actuator
About adhesive
About MEMS
About resonance frequency
About insulator
About conductive property
About paste
About silicon
About polyimide
About 印加電圧
About シリコンウエハ
About マイクロミラー
About Manufacturing technology of solid-state devices
About MEMS
About ミラー装置
About 開発