About Schulz Christian
About Institute of Microwave Systems, Ruhr-University Bochum, 44801 Bochum, Germany
About Rolfes Ilona
About Institute of Microwave Systems, Ruhr-University Bochum, 44801 Bochum, Germany
About IEEE Conference Proceedings
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About adsorbent
About process control
About three dimension
About plasma diagnostics
About loss tangent
About probe
About electromagnetic field
About plasma probe
About permittivity
About plasma
About critical parameter
About adaptability
About dielectric material
About dielectrics
About 酸素プラズマ
About Dielectrics in general
About Insulating materials
About Measuring techniques and equipments of dielectric properties
About 誘電体
About 堆積過程
About プラズマ診断