Art

J-GLOBAL ID：201702244177505057   Reference number：17A0027172

Improving the Performances of CdTe Gamma Ray Detectors by H₂/Ar ECR Plasma Processing

H₂/Ar ECRプラズマ処理によるCdTeガンマ線検出器の性能向上

Author (5)： Niraula M. (Graduate School of Engineering, Nagoya Institute of Technology, Nagoya, Japan) ,  Yasuda K. (Graduate School of Engineering, Nagoya Institute of Technology, Nagoya, Japan) ,  Kitagawa S. (Graduate School of Engineering, Nagoya Institute of Technology, Nagoya, Japan) ,  Kojima M. (Graduate School of Engineering, Nagoya Institute of Technology, Nagoya, Japan) ,  Agata Y. (Graduate School of Engineering, Nagoya Institute of Technology, Nagoya, Japan)
Material： IEEE Electron Device Letters  (IEEE Electron Device Lett)
Volume： 37  Issue： 8  Page： 1059-1062  Publication year： 2016 
JST Material Number： B0344B  ISSN： 0741-3106  CODEN： EDLEDZ  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： electron cyclotron resonance plasma ,  *cadmium telluride ,  *gamma-ray detector ,  X-ray photoelectron spectroscopy ,  leakage current ,  etching ,  plasma treatment ,  crystal ,  detector ,  tellurium ,  gamma-ray
Semi thesaurus term： *CdTe ,  Te

JST classification (2)： Solic-state devices in general  (NC03010Z) ,  Photometry and photodetectors in general  (BD07031F)

Terms in the title (6)： H2 ,  Ar ,  ECRプラズマ ,  CdTe ,  ガンマ線検出器 ,  性能向上