Art
J-GLOBAL ID：201702248387307003   Reference number：17A0362567

Influence of local thermal dissipation on electromigration in an Al thin-film line

Al薄膜線におけるエレクトロマイグレーションへの局所熱散逸の影響【Powered by NICT】
Author (3)：
Li Yuan

About Li Yuan

(Department of Nanomechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan)

About Department of Nanomechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

, 
Lee Hsin-Tzu

About Lee Hsin-Tzu

(Department of Nanomechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan)

About Department of Nanomechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

, 
Saka Masumi

About Saka Masumi

(Department of Nanomechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan)

About Department of Nanomechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan


Material：
Microelectronics Reliability  (Microelectronics and Reliability)

About Microelectronics Reliability


Volume： 65  Page： 178-183  Publication year： 2016 
JST Material Number： C0530A  ISSN： 0026-2714  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Abstract/Point：
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
wiring

About wiring

, 
*electromigration

About electromigration

, 
reliability (property)

About reliability (property)

, 
voltage measurement

About voltage measurement

, 
*Aluminum

About Aluminum

, 
pad

About pad

, 
integrated circuit

About integrated circuit

, 
*thin film

About thin film

, 
Finite Element Analysis

About Finite Element Analysis

, 
*thermal runaway

About thermal runaway


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ヒロック

About ヒロック

, 
電流ストレス

About 電流ストレス

, 【Automatic Indexing@JST】
Author keywords (5)：
Al thin-film line

About Al thin-film line

, 
Current stressing

About Current stressing

, 
Atomic flux divergence

About Atomic flux divergence

, 
Electromigration

About Electromigration

, 
Local thermal dissipation

About Local thermal dissipation

JST classification (2)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
Al

About Al

, 
薄膜

About 薄膜

, 
エレクトロマイグレーション

About エレクトロマイグレーション

, 
熱散逸

About 熱散逸


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