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J-GLOBAL ID:201702270213236008   Reference number:17A1354997

Silicon-based micro thermoelectric generator fabricated by CMOS compatible process

CMOS互換プロセスで作製したシリコンベースのマイクロ熱電発電機【Powered by NICT】
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Volume: 2017  Issue: IMFEDK  Page: 22-23  Publication year: 2017 
JST Material Number: W2441A  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Energy harvester is a key devi...
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Energy conversion equipment  ,  Thermoelectric power generation,thermionic power generation  ,  Other power generations 

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