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J-GLOBAL ID:201702270361176919   Reference number:17A0863954

Fabrication and evaluation of low temperature solution processed IGZO thin film transistor with low rare metal composition

低In,Ga領域における低湿塗布プロセスIGZO薄膜トランジスタの作製と評価
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Volume: DEI-17  Issue: 63-71  Page: 29-32  Publication year: Jun. 29, 2017
JST Material Number: Z0908B  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semiconductor thin films  ,  Transistors 
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