Art

J-GLOBAL ID：201702272370801938   Reference number：17A0132884

In situ TEM study of electron-beam radiation induced boron diffusion and effects on phase and microstructure evolution in nanostructured CoFeB/SiO₂ thin film

ナノ構造CoFeB/SiO₂ナノ構造薄膜中の電子ビーム誘起ホウ素拡散のその場TEM研究と相及び微細構造発展への効果

Author (8)： Liu B. H. (Department of Product, Test and Failure Analysis, Globalfoundries Singapore Pte. Ltd., 738406 Singapore) ,  Teo H. W. (Department of Quality and Reality Analysis, Globalfoundries Singapore Pte. Ltd., 738406 Singapore) ,  Mo Z. H. (Department of Quality and Reality Analysis, Globalfoundries Singapore Pte. Ltd., 738406 Singapore) ,  Mai Z. H. (Department of Product, Test and Failure Analysis, Globalfoundries Singapore Pte. Ltd., 738406 Singapore) ,  Lam J. (Department of Product, Test and Failure Analysis, Globalfoundries Singapore Pte. Ltd., 738406 Singapore) ,  Xue J. M. (Department of Materials Science and Engineering, National University of Singapore, 117575 Singapore) ,  Zhao Y. Z. (Department of Product, Test and Failure Analysis, Globalfoundries Singapore Pte. Ltd., 738406 Singapore) ,  Tan P. K. (Department of Product, Test and Failure Analysis, Globalfoundries Singapore Pte. Ltd., 738406 Singapore)
Material： Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)
Volume： 121  Issue： 1  Page： 015111-015111-11  Publication year： Jan. 07, 2017 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Using in situ transmission ele...

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Thesaurus term： *electron beam ,  *Diffusion ,  *phase constitution ,  *micro structure ,  transmission electron microscope ,  precipitation (phase separation) ,  *layer ,  radiation dose ,  amorphization ,  interface (surface) ,  nucleation ,  *cobalt base alloy ,  iron containing alloy ,  boron containing alloy ,  thin film ,  *carbon dioxide ,  nanostructure ,  boron ,  phase transformation ,  electron irradiation ,  *lamination

JST classification (2)： Metallic thin films  (BK14030T) ,  Irradiational changes of metals  (BK16122N)

Terms in the title (11)： ナノ構造 ,  SiO2 ,  薄膜 ,  電子ビーム ,  誘起 ,  ホウ素 ,  拡散 ,  その場TEM ,  研究 ,  微細構造 ,  発展