About UI A.
About Toshiba Corp., Kanagawa, JPN
About SATO Y.
About Toshiba Corp., Kanagawa, JPN
About SASAKI T.
About Toshiba Corp., Mie, JPN
About SAKAI I.
About Toshiba Corp., Mie, JPN
About HAYASHI H.
About Toshiba Corp., Mie, JPN
About Proceedings of International Symposium on Dry Process
About incidence
About plasma production
About angular distribution
About RIE
About Plasma production and heating
About 斜め入射
About イオン
About 研究