Ryosuke Kizu

Affiliation and department：

Research field (2)： Measurement engineering , Manufacturing and production engineering

Research theme for competitive and other funds (6)：

2024 - 2029 測長型走査トンネル顕微鏡による結晶格子間隔の絶対計測
2023 - 2024 スケール解析に基づくノイズ補正によるラインエッジラフネス分布計測技術の開発
2023 - 2024 Development of multi scale Imaging coupling method for transmission electron microscopy to realize ultra-wide field of view high precision measurement
2020 - 2023 測長原子間力顕微鏡を介した格子面間隔の透過電子顕微鏡によるSIトレーサブルな測長
2019 - 2023 Ultraprecise dimensional measurement of semiconductor nanostructures

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Papers (19)：

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Evaluation of the change in photoresist sidewall roughness due to electron beam-induced shrinkage using atomic force microscopy. Journal of Micro/Nanopatterning, Materials, and Metrology. 2023. 22. 04
Keita Kobayashi, Ryosuke Kizu. Experimental evaluation of usable specimen thickness of Si for lattice imaging by transmission electron microscopy at 300 kV. Ultramicroscopy. 2023. 256. 113876
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Developmental framework of line edge roughness reference standards for next-generation functional micro-/nanostructures. Precision Engineering. 2023. 83. 152-158
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Effect of white noise on roughness measurements of self-affine fractals. Measurement Science and Technology. 2023. 34. 10. 105003-105003
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique. Journal of Applied Physics. 2023. 133. 6. 065302-065302

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MISC (7)：

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Photoresist shrinkage observation by a metrological tilting-AFM. Metrology, Inspection, and Process Control XXXVII. 2023
Ichiko Misumi, Ryosuke Kizu, Kentaro Sugawara, Akiko Hirai, Satoshi Gonda. Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM. Measurement: Sensors. 2021. 18. 100092-100092
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Evaluating SEM-based LER metrology using a metrological tilting-AFM. Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. 2021
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Comparison of SEM and AFM performances for LER reference metrology. Metrology, Inspection, and Process Control for Microlithography XXXIV. 2020. 11325. 113250Q
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda. Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness. Metrology, Inspection, and Process Control for Microlithography XXXIII. 2019. 109592. 109592B

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Patents (2)：

Lectures and oral presentations (20)：

測長型原子間力顕微鏡によるナノ構造の寸法・形状計測
(2024年度精密工学会秋季大会学術講演会 2024)
Evaluation of angular errors in a piezo flexure scanner for metrological atomic force microscopy
(International Conference on Precision Engineering and Sustainable Manufacturing (PRESM) 2024 2024)
SEM観察に伴うEUVレジスト収縮変形のAFM計測評価
(NGLワークショップ2024 2024)
半導体微細パターンのラフネス形状計測とノイズを含むデータの解析
(第53回情報計測オンラインセミナー 2024)
AFM observation of EUV photoresist shrinkage due to electron-beam exposure
(SPIE Advanced Lithography + Patterning 2024 2024)

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Awards (3)：

2024/07 - International Conference on Precision Engineering and Sustainable Manufacturing (PRESM) 2024 Young Researcher Award
2022/03 - 公益社団法人精密工学会ベストプレゼンテーション賞
2019/05 - 2018 Highlights of Measurement Science and Technology "Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology"

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