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J-GLOBAL ID：201802216109662310   Reference number：18A0454503

1201 Machining quality controls in ultrashort pulse laser micromachining on lithium niobate substrates

ニオブ酸リチウム基板での超短パルスレーザ光微細加工における加工品質制御

Author (6)： ONUKI Teppei (Intelligent systems engineering, Ibaraki University) ,  OJIMA Hirotaka (Intelligent systems engineering, Ibaraki University) ,  SHIMIZU Jun (Intelligent systems engineering, Ibaraki University) ,  ZHOU Libo (Intelligent systems engineering, Ibaraki University) ,  TAKAHAMA Itaru (Intelligent systems engineering, Ibaraki University) ,  KAMOSHIDA Kazuki (Intelligent systems engineering, Ibaraki University)
Material： Proceedings of International Conference on Leading Edge Manufacturing in 21st Century (Web)
Volume： 2015.8  Page： _1201-1_-_1201-4_(J-STAGE)  Publication year： 2015 
JST Material Number： U1247A  ISSN： 2424-3086  Document type： Proceedings
Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Abstract/Point： The physical relations between...

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Author keywords (4)： lithium niobate ,  laser ablation ,  ultrashort pulsed laser ,  laser micromachining

Terms in the title (4)： ニオブ酸リチウム ,  短パルスレーザ ,  微細加工 ,  品質制御