Art

J-GLOBAL ID：201802219712706431   Reference number：18A1488431

Ultra-thin TiO₂ films by atomic layer deposition and surface functionalization with Au nanodots for sensing applications

センシング応用のためのAuナノドットによる原子層堆積と表面官能化による超薄TiO_2膜【JST・京大機械翻訳】

Author (13)： Lupan Oleg (Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany) ,  Lupan Oleg (Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova) ,  Postica Vasile (Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova) ,  Ababii Nicolai (Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova) ,  Reimer Tim (Fraunhofer Institute for Silicon Technologies, (ISIT), Fraunhoferstr. 1, D-25524 Itzehoe, Germany) ,  Reimer Tim (Institute of Electrical Engineering and Information Technology, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany) ,  Shree Sindu (Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany) ,  Hoppe Mathias (Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany) ,  Polonskyi Oleksandr (Chair for Multicomponent Materials, Institute for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany) ,  Sontea Victor (Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova) ,  Chemnitz Steffen (Institute of Electrical Engineering and Information Technology, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany) ,  Faupel Franz (Chair for Multicomponent Materials, Institute for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany) ,  Adelung Rainer (Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
Material： Materials Science in Semiconductor Processing  (Mater Sci Semicond Process)
Volume： 87  Page： 44-53  Publication year： 2018 
JST Material Number： W1055A  ISSN： 1369-8001  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Abstract/Point： The massive application reques...

Register(free) or Log In to access     To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=18A1488431&from=J-GLOBAL&jstjournalNo=W1055A") }}

Thesaurus term： morphology (form) ,  film thickness ,  Debye length ,  thin film ,  nanocluster ,  *Gold ,  anatase ,  ultrathin film ,  nano particle ,  precious metal ,  semiconductor ,  bilayer ,  gold nanoparticle ,  *surface functionalization ,  length ,  geometric quantity
Semi thesaurus term： *表面官能化 , 【Automatic Indexing@JST】

Author keywords (5)： TiO₂ ,  Ultra-thin films ,  Atomic layer deposition ,  Gas sensor ,  UV photodetector

JST classification (1)： Materials of solid-state devices  (NC03020K)

Terms in the title (6)： センシング ,  応用 ,  Au ,  ナノドット ,  原子層堆積 ,  表面官能化