Mechanism of asymmetric etched profiles in trimming process

NEGISHI Nobuyuki; NEGISHI Nobuyuki; MIYAKE Masatoshi; TAKEDA Keigo; HORI Masaru

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J-GLOBAL ID：201802230672613694 Reference number：18A2161644

Mechanism of asymmetric etched profiles in trimming process

トリミング工程における非対称エッチングプロファイルの機構

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Author (5)： , , , ,
Material：
Volume： 57 Issue： 10 Page： 106201.1-106201.8 Publication year： Oct. 2018
JST Material Number： G0520B ISSN： 0021-4922 CODEN： JJAPB6 Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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