Art
J-GLOBAL ID:201802238164356917   Reference number:18A0616759

Spherical aberration correction with an in-lens N-fold symmetric line currents model

インレンズN重対称線電流モデルを用いた球面収差補正【Powered by NICT】
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Volume: 187  Page: 135-143  Publication year: 2018 
JST Material Number: W0972A  ISSN: 0304-3991  CODEN: ULTRD  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Microscopy determination of structures  ,  Electron and ion microscopes 
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