Art
J-GLOBAL ID：201802241055026145   Reference number：18A0012760

Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing

材料加工のための旋回正方形容量性RF放電プラズマスパッタリングソースの性能
Author (4)：
HOSSAIN Md. Amzad

About HOSSAIN Md. Amzad

(Saga Univ., Saga, JPN)

About Saga Univ., Saga, JPN

, 
HOSSAIN Md. Amzad

About HOSSAIN Md. Amzad

(Jessore Univ. Sci. and Technol., Jessore, BGD)

About Jessore Univ. Sci. and Technol., Jessore, BGD

, 
OHTSU Yasunori

About OHTSU Yasunori

(Saga Univ., Saga, JPN)

About Saga Univ., Saga, JPN

, 
TABARU Tatsuo

About TABARU Tatsuo

(National Inst. of Advanced Industrial Sci. and Technol., Saga, JPN)

About National Inst. of Advanced Industrial Sci. and Technol., Saga, JPN


Material：
Plasma Chemistry and Plasma Processing  (Plasma Chem Plasma Process)

About Plasma Chemistry and Plasma Processing


Volume： 37  Issue： 6  Page： 1663-1677  Publication year： Nov. 2017 
JST Material Number： H0836A  ISSN： 0272-4324  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
radiofrequency discharge

About radiofrequency discharge

, 
plasma

About plasma

, 
*sputtering

About sputtering

, 
working and processing

About working and processing

, 
permanent magnet

About permanent magnet

, 
*sputtering system

About sputtering system

, 
metallic thin film

About metallic thin film

, 
magnetic shielding

About magnetic shielding

, 
X-Ray Diffraction

About X-Ray Diffraction

, 
material processing

About material processing

, 
copper film

About copper film


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
neodymium permanent magnet

About neodymium permanent magnet

, 
magnetic shielding

About magnetic shielding


JST classification (2)：
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

,  Sputtering 
(BK16110U)

About Sputtering

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
材料加工

About 材料加工

, 
旋回

About 旋回

, 
正方形

About 正方形

, 
容量性

About 容量性

, 
RF放電

About RF放電

, 
プラズマスパッタリング

About プラズマスパッタリング

, 
ソース

About ソース


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