Art

J-GLOBAL ID：201802245785441954   Reference number：18A0854675

Microscale ultrahigh-frequency resonant wireless powering for capacitive and resistive MEMS actuators

容量性および抵抗性MEMSアクチュエータのためのマイクロスケール超高周波共振無線電力供給【JST・京大機械翻訳】

Author (11)： Mita Yoshio (Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo, 7-3-1, Hongo Bunkyo-ku, 113-8656 Tokyo, Japan) ,  Mita Yoshio (VLSI Design and Education Center, The University of Tokyo, 2-11-16, Yayoi Bunkyo-ku, 113-8656 Tokyo, Japan) ,  Mita Yoshio (LIMMS, CNRS-UTokyo IIS, UMI 2820, 4-6-1, Komaba Meguro-ku, 153-8505 Tokyo, Japan) ,  Sakamoto Naoyuki (Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo, 7-3-1, Hongo Bunkyo-ku, 113-8656 Tokyo, Japan) ,  Usami Naoto (Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo, 7-3-1, Hongo Bunkyo-ku, 113-8656 Tokyo, Japan) ,  Frappe Antoine (IEMN-ISEN, CNRS UMR 8520, 41, Boulevard Vauban, 59046 Lille cedex, France) ,  Higo Akio (VLSI Design and Education Center, The University of Tokyo, 2-11-16, Yayoi Bunkyo-ku, 113-8656 Tokyo, Japan) ,  Stefanelli Bruno (IEMN-ISEN, CNRS UMR 8520, 41, Boulevard Vauban, 59046 Lille cedex, France) ,  Shiomi Hidehisa (Graduate School of Engineering Science, Osaka University, 1-3, Machikaneyamacho Toyonaka, 560-8531 Osaka, Japan) ,  Bourgeois Julien (FEMTO-ST Institute, Univ. Bourgogne Franche-Comte, CNRS, Montbeliard, France) ,  Kaiser Andreas (IEMN-ISEN, CNRS UMR 8520, 41, Boulevard Vauban, 59046 Lille cedex, France)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 275  Page： 75-87  Publication year： 2018 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： This paper presents a versatil...

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Thesaurus term： *resonance (vibration) ,  antenna (electric) ,  transmitter ,  *power supply ,  electric current ,  resonance frequency ,  impedance matching ,  receiver ,  electrostatic capacity ,  interface ,  *MEMS ,  resonance circuit ,  *actuator ,  voltage ,  *electric power

Author keywords (7)： Wireless MEMS powering ,  Ultrahigh frequency (UHF) ,  Radio frequency ,  Resonant mode energy transfer ,  Electrostatic actuator ,  Thermal actuator ,  Amplitude modulation (AM)

JST classification (3)： Resonator  (NC04050Y) ,  Manufacturing technology of solid-state devices  (NC03030V) ,  Piezoelectric devices  (NC03110I)

Terms in the title (9)： 容量性 ,  抵抗性 ,  MEMS ,  アクチュエータ ,  マイクロスケール ,  超高周波 ,  共振 ,  無線 ,  電力供給